Optical dimensional metrology for 3D objects of constant thickness

Measurement: Journal of the International Measurement Confederation

Volumn 30, Issue 1, 2001, Pages 19-31

  Chugui, Yu V ^a  

^a TECHNOLOGICAL DESIGN INSTITUTE OF SCIENTIFIC INSTRUMENT ENGINEERING   (Russian Federation)

Author keywords

3D diffraction and imaging; 3D sensing; Dimensional metrology; Optical inspection; Optical measurements

Indexed keywords

ALGORITHMS; COHERENT LIGHT; IMAGING TECHNIQUES; MEASUREMENT ERRORS; THICKNESS MEASUREMENT;

OPTICAL DIMENSIONAL METROLOGY;

OPTICAL VARIABLES MEASUREMENT;

EID: 0035400804     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0263-2241(00)00055-5     Document Type: Article

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