1-D Pitch Measurements by Laser Diffractometer and Atomic Force Microscope

Proceeding of the International Symposium on Precision Mechanical Measurements, ISIST 2002

Volumn 4, Issue , 2002, Pages 5-059

  Shan Peng, Pan ^a,b   Chao Jung, Chen ^b   Liang Chih, Chang ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b Dimensional Measurement Laboratory   (Taiwan)

Author keywords

Atomic Force Microscope; Laser diffractometer; Pitch standard

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTOMETERS; ELECTROMAGNETIC WAVE DIFFRACTION; IMAGE PROCESSING; LASER APPLICATIONS; MICROSCOPES; SCANNING;

ATOMIC FORCE MICROSCOPES; LASER DIFFRACTOMETERS; PITCH MEASUREMENT; PITCH STANDARDS;

OPTICAL VARIABLES MEASUREMENT;

EID: 2342441121     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

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4. Chao-Jung Chen, Paul Lui and Gwo-Sheng Peng, "Introduction to metrology AFM", Measurement Information (in Chinese), Vol. 80, No.7, pp21-26, 2001.