Advanced optics characterization

Optics and Photonics News

Volumn 12, Issue 2, 2001, Pages 34-37

  Davies, Angela ^a   Tarrio, Charles ^a   Evans, Chris ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

FABRY-PEROT INTERFEROMETERS; MULTILAYERS; OPTICAL SYSTEMS; OPTICAL TESTING; PHOTOLITHOGRAPHY; ULTRAVIOLET RADIATION;

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL);

ASPHERICS;

EID: 0035263142     PISSN: 10476938     EISSN: None     Source Type: Trade Journal    
DOI: 10.1364/OPN.12.2.000034     Document Type: Article

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12. M. Haass et al., "Variable groove-spaced grating monochromators for synchrotron light sources," Nucl. Inst. Meth. A 347, 258 (1994); C. Tarrio, R. N. Watts, T. B. Lucatorto, M. Haass, T.A. Calcott, and J. Jia, "New NIST/DARPA National Soft X-ray Reflectometry Facility," J. X-ray Sci. Tech. 4, 96 (1994).
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