Stability of the reference flat used in Fizeau interferometer and its contribution to measurement uncertainty

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5190, Issue , 2003, Pages 431-439

  Takatsuji, Toshiyuki ^a   Osawa, Sonko ^a   Kuriyama, Yutaka ^b   Kurosawa, Tomizo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b MITUTOYO CORPORATION   (Japan)

Author keywords

Fizeau interferometer; Flatness; Interferometry; Uncertainty

Indexed keywords

ALUMINUM; DEFORMATION; FINITE ELEMENT METHOD; FUSED SILICA; INTERFEROMETRY; LIGHT REFLECTION; NUMERICAL METHODS; UNCERTAIN SYSTEMS;

FIZEAU INTERFEROMETER; FLATNESS; TRACEABLE MEASUREMENTS; UNCERTAINTY;

INTERFEROMETERS;

EID: 2342514805     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.505537     Document Type: Conference Paper

References (2)

1. T. Takatsuji, "Japanese Ultimate Flatness Interferometer (FUJI) and its preliminary experiment", Recent Developments in Traceable Dimensional Metrology, J. E. Dekker and N. Brown ed., Vol. 4401, pp. 83-90, SPIE, Munich, Germany, 2001.
2. K. Hibino and M. Yamauchi, "Phase-Measuring Algorithms to Suppress Spatially Nonuniform Phase Modulation in a Two-Beam Interferometer", Optical Review, Vol.7, pp. 543-549, 2000.