Gas sensing characteristics of copper phthalocyanine films: Effects of film thickness and sensing temperature

Sensors and Actuators, B: Chemical

Volumn 99, Issue 2-3, 2004, Pages 281-287

  Lee, Yuh Lang ^a   Sheu, Chuan Yi ^a   Hsiao, Rung Hwa ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Film thickness; Gas sensor; Phthalocyanine; Sensing temperature; Vacuum deposition

Indexed keywords

ANNEALING; COPPER COMPOUNDS; DEPOSITION; GOLD; LOW TEMPERATURE EFFECTS; NITROGEN OXIDES; SOLUBILITY; THIN FILMS; VACUUM;

FILM THICKNESS; PHTHALOCYANINE; SENSING TEMPERATURE; VACUUM DEPOSITION;

CHEMICAL SENSORS;

EID: 2342512187     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2003.11.024     Document Type: Article

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