Replicated optical MEMS in sol-gel materials

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 20-21

  Gale, M T ^a   Obi, S ^a   De Rooij, N ^b  

^a CSEM   (Switzerland)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Glass; Lithography; Micromechanical devices; Microstructure; Nanostructured materials; Optical device fabrication; Optical films; Optical materials; Optical polymers; Semiconductor materials

Indexed keywords

CURING; FABRICATION; FILMS; GLASS; LITHOGRAPHY; MICROLENSES; MICROMACHINING; MICROSTRUCTURE; MOEMS; NANOSTRUCTURED MATERIALS; OPTICAL FILMS; OPTICAL GLASS; OPTICAL MATERIALS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR MATERIALS; SOL-GEL PROCESS; SOL-GELS;

HIGH RESOLUTION; MASS PRODUCTION; MICROMECHANICAL DEVICE; OPTICAL DEVICE FABRICATION; OPTICAL FEATURES; OPTICAL POLYMERS; REPLICATION TECHNOLOGY; SOL-GEL MATERIALS;

LENSES;

EID: 21844474976     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233447     Document Type: Conference Paper

References (3)

1. Brite-Euram Project BE97-4641 DONDODEM. ORMOCER® is a registered trademark of the Fraunhofer-Gesellschaft.
2. R. Buestrich, F. Kahlenberg, M. Popall, P. Dannberg, R. Müller-Fiedler and O. Rösch, "ORMOCER®s for Optical Interconnect Technology", J. Sol-Gel Science and Technology, 20, 181-186 (2001)
3. Product of Suss MicroTec AG, Asslar, Germany.