Reliability of micromachined membranes under particle impact

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 436-439

  Wagner, U ^a   Bernhard, W ^a   Muller Fiedler R ^a   Michel, B ^b   Paul, O ^c  

^a ROBERT BOSCH GMBH   (Germany)

^b FRAUNHOFER IZM   (Germany)

^c UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Biomembranes; Fabrication; Failure analysis; Frequency measurement; Geometrical optics; Projectiles; Silicon; Stress measurement; Tensile stress; Testing

Indexed keywords

ACTUATORS; FABRICATION; GEOMETRICAL OPTICS; GEOMETRY; MEMBRANES; MICROSYSTEMS; PROJECTILES; SILICON; SILICON NITRIDE; SOLID-STATE SENSORS; STRESS MEASUREMENT; TENSILE STRESS; TENSILE TESTING; TESTING; TRANSDUCERS;

ABSOLUTE DISTANCE; BIOMEMBRANES; FREQUENCY MEASUREMENTS; MECHANICAL RELIABILITY; MICROMACHINED MEMBRANES; NUMERICAL RESULTS; PARTICLE BOMBARDMENT; SILICON NITRIDE MEMBRANE;

FAILURE ANALYSIS;

EID: 2342489767     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215347     Document Type: Conference Paper

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