Diamond turning assisted fabrication of a high numerical aperture lens assembly for 157 nm microlithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5176, Issue , 2003, Pages 36-43

  Arriola, Edmund W ^a  

^a NEWPORT CORPORATION   (United States)

Author keywords

Diamond turning; DUV lens; Microlithography; Optomechanical assembly; Optomechanical integration; Subcells

Indexed keywords

ABERRATIONS; BIREFRINGENCE; DIAMONDS; DIFFRACTIVE OPTICS; LITHOGRAPHY; OPTICAL DESIGN; OPTIMIZATION; PHOTORESISTORS; SEMICONDUCTOR DEVICE MANUFACTURE; VACUUM;

DEEP ULTRAVIOLET (DUV); DIAMOND TURNING; OPTOMECHANICAL ASSEMBLY; OPTOMECHANICAL INTEGRATION; SUBCELLS;

OPTICAL INSTRUMENT LENSES;

EID: 2342481204     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.503765     Document Type: Conference Paper

References (11)

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10. Thanks to MIT Lincoln Laboratory, Dr. Mordechai Rothschild and Dr. Michael Switkes for their support and guidance.
11. Thanks to Dr. Mordechai Rothschild, Mark Carroll and Mark Maiberger for their review and assistance in writing this paper.