-
1
-
-
0005090723
-
Market Analysis for Microsystems - An Interim Report from NEXUS Task Force
-
Warschau
-
R. Wechsung and J. C. Eloy, "Market Analysis for Microsystems - an Interim Report From NEXUS Task Force," Proc. EUROSENSORS XI, Warschau (1997).
-
(1997)
Proc. EUROSENSORS XI
-
-
Wechsung, R.1
Eloy, J.C.2
-
2
-
-
85194770513
-
-
Scottsdale, AZ, April 25, Cahners In-Stat/MDR Press Releases
-
MEMS Industry Matures, "Big Changes Lie Ahead," Scottsdale, AZ, April 25, 2001, Cahners In-Stat/MDR Press Releases, http://www.instat.com/pr/ 2001/ea0102mf_pr.htm.
-
(2001)
Big Changes Lie Ahead
-
-
-
5
-
-
0036494216
-
-
W. Michaeli, A. Spennemann, and H. Gärtner, Microsystems Tech., 8, 55 (2002).
-
(2002)
Microsystems Tech.
, vol.8
, pp. 55
-
-
Michaeli, W.1
Spennemann, A.2
Gärtner, H.3
-
7
-
-
25144432208
-
-
L. Yu, C. G. Koh, K. W. Koelling, L. J. Lee, and M. Madou, SPE ANTEC, 785 (2001).
-
(2001)
SPE ANTEC
, pp. 785
-
-
Yu, L.1
Koh, C.G.2
Koelling, K.W.3
Lee, L.J.4
Madou, M.5
-
12
-
-
15844372239
-
-
L. Yu, Y. L. Juang, K. W. Koelling, and L. J. Lee, SPE ANTEC, 468 (2000).
-
(2000)
SPE ANTEC
, pp. 468
-
-
Yu, L.1
Juang, Y.L.2
Koelling, K.W.3
Lee, L.J.4
-
13
-
-
85194741268
-
-
O. Rötung, H. Röpke, H. Becker, and C. Gärtner, Microsystems Tech., 8, 32 (2002).
-
(2002)
Microsystems Tech.
, vol.8
, pp. 32
-
-
Rötung, O.1
Röpke, H.2
Becker, H.3
Gärtner, C.4
-
14
-
-
0029357345
-
-
E. Kim, Y. Xia, and G. M. Whitesides, Nature, 376, 581 (1995).
-
(1995)
Nature
, vol.376
, pp. 581
-
-
Kim, E.1
Xia, Y.2
Whitesides, G.M.3
-
15
-
-
0030948781
-
-
E. Delamarche, A. Bernard, H. Schmid, B. Michel, and H. Biebuyck, Science, 276, 779 (1997).
-
(1997)
Science
, vol.276
, pp. 779
-
-
Delamarche, E.1
Bernard, A.2
Schmid, H.3
Michel, B.4
Biebuyck, H.5
-
18
-
-
0042282177
-
-
M. S. Despa, K. W. Kelly, and J. R. Collier, Microsystems Tech., 6, 60 (1999).
-
(1999)
Microsystems Tech.
, vol.6
, pp. 60
-
-
Despa, M.S.1
Kelly, K.W.2
Collier, J.R.3
-
19
-
-
0010077840
-
-
A. Gerlach, G. Knebel, A. E. Guber, M. Heckele, D. Hermann, A. Muslija, and Th. Schaller, Microsystems Tech., 7, 265 (2002).
-
(2002)
Microsystems Tech.
, vol.7
, pp. 265
-
-
Gerlach, A.1
Knebel, G.2
Guber, A.E.3
Heckele, M.4
Hermann, D.5
Muslija, A.6
Schaller, Th.7
-
21
-
-
0002138357
-
-
R. Knitter, D. Göhring, P. Risthaus, and J. Haußelt, Microsystems Tech., 7, 85 (2001).
-
(2001)
Microsystems Tech.
, vol.7
, pp. 85
-
-
Knitter, R.1
Göhring, D.2
Risthaus, P.3
Haußelt, J.4
-
22
-
-
0038446069
-
-
A. Rota, T.-V. Duong, and T. Hartwig, Microsystems Tech., 7, 225 (2002).
-
(2002)
Microsystems Tech.
, vol.7
, pp. 225
-
-
Rota, A.1
Duong, T.-V.2
Hartwig, T.3
-
23
-
-
0001879887
-
-
V. Plotter, W. Bauer, T. Benzler, and A. Emde, Microsystems Tech., 7, 99 (2001).
-
(2001)
Microsystems Tech.
, vol.7
, pp. 99
-
-
Plotter, V.1
Bauer, W.2
Benzler, T.3
Emde, A.4
-
25
-
-
85194723343
-
-
T. L. Edwards, S. K. Mohanty, A. B. Frazier, R. K. Edwards, and C. L. Thomas, SPE ANTEC, 3083 (2001).
-
(2001)
SPE ANTEC
, pp. 3083
-
-
Edwards, T.L.1
Mohanty, S.K.2
Frazier, A.B.3
Edwards, R.K.4
Thomas, C.L.5
-
26
-
-
0041902162
-
-
W. Ehrfeld, M. Begemann, U. Berg, A. Lohf, M. Michel, and M. Nienhaus, Microsystems Tech., 7, 145 (2001).
-
(2001)
Microsystems Tech.
, vol.7
, pp. 145
-
-
Ehrfeld, W.1
Begemann, M.2
Berg, U.3
Lohf, A.4
Michel, M.5
Nienhaus, M.6
-
27
-
-
0029350934
-
-
M. C. Wu, L.-Y. Lin, S.-S. Lee, and K. S. J. Pister, Sens. Act, A50, 127-134 (1995).
-
(1995)
Sens. Act.
, vol.A50
, pp. 127-134
-
-
Wu, M.C.1
Lin, L.-Y.2
Lee, S.-S.3
Pister, K.S.J.4
-
29
-
-
0342545946
-
-
G. Schürmann, W. Noell, U. Staufer, and N. F. de Rooji, Ultramicroscopy, 82, 33-38 (2000).
-
(2000)
Ultramicroscopy
, vol.82
, pp. 33-38
-
-
Schürmann, G.1
Noell, W.2
Staufer, U.3
De Rooji, N.F.4
-
30
-
-
17444444953
-
-
M. Radmacher, K. Eberle, and H. E. Gaub, Ultramicroscopy, 42-44, 968-972 (1992).
-
(1992)
Ultramicroscopy
, vol.42-44
, pp. 968-972
-
-
Radmacher, M.1
Eberle, K.2
Gaub, H.E.3
-
31
-
-
0033171353
-
-
S. M. Garner, S.-S. Lee, V. Chuyanov, A. Chen, A. Yacoubian, W. H. Steier, and L. R. Dalton, IEEE J. Quantum Mech., 35, 1146-1155 (1999).
-
(1999)
IEEE J. Quantum Mech.
, vol.35
, pp. 1146-1155
-
-
Garner, S.M.1
Lee, S.-S.2
Chuyanov, V.3
Chen, A.4
Yacoubian, A.5
Steier, W.H.6
Dalton, L.R.7
-
32
-
-
0028748021
-
-
M. T. Gale, L. G. Baraldi, and R. E. Kuntz, Proc. SPIE, 2213, 2-10 (1994).
-
(1994)
Proc. SPIE
, vol.2213
, pp. 2-10
-
-
Gale, M.T.1
Baraldi, L.G.2
Kuntz, R.E.3
-
34
-
-
84989126636
-
-
H. H. Chiang, C. A. Hieber, and K. K. Wang, Polym. Eng. Sci., 31, 116 (1991).
-
(1991)
Polym. Eng. Sci.
, vol.31
, pp. 116
-
-
Chiang, H.H.1
Hieber, C.A.2
Wang, K.K.3
-
35
-
-
84989026826
-
-
H. H. Chiang, C. A. Hieber, and K. K. Wang, Polym. Eng. Sci., 31, 125 (1991).
-
(1991)
Polym. Eng. Sci.
, vol.31
, pp. 125
-
-
Chiang, H.H.1
Hieber, C.A.2
Wang, K.K.3
|