Reduction of carbon-based interferences in organic compound analysis by dynamic reaction cell ICP MS

Spectroscopy (Santa Monica)

Volumn 19, Issue 9, 2004, Pages 14-23

  Kishi, Yoko ^b   Kawabata, Katsu ^a   Shi, Haiying ^c   Thomas, Robert ^a  

^a PerkinElmer Instruments ^*

^b Semiconductor Business Unit

^c BREWER SCIENCE INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC REACTION CELL (DRC); PERFLUOROALKANES (PFA); POLYATOMIC INTERFERENCES; SEMICONDUCTOR INDUSTRY;

AMMONIA; ARGON; CARBON; IONIZATION; MASS SPECTROMETERS; MASS SPECTROMETRY; ORGANIC SOLVENTS; PARAFFINS; SEMICONDUCTOR MATERIALS; VISCOSITY;

INDUCTIVELY COUPLED PLASMA;

EID: 23344443582     PISSN: 08876703     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

References (9)

1. F. Meyer, J. White, and M. Radle, Semiconductor International (Web site), June 1999.
2. E. McCurdy and D. Potter, Semiconductor International (Web site), October, 2001.
3. S. Tanner and V. Baranov, Plasma Source Mass Spectrometry (The Royal Society of Chemistry, Cambridge, 1999), p. 46.
4. K. Kawabata and Y. Kishi, Proceedings from Semiconductor Pure Water and Chemical Conference, Los Altos, CA, pp. 241-253 (2001).
5. I. Feldman, N. Jakubowski, C. Thomas, and D. Stuewer, Fresenius Journal of Analytical Chemistry 365, 422-428 (1999).
6. N. Yamada and J. Takahashi, Winter Conference on Plasma Spectrochemistry, Scottsdale, AZ, January, 2002.
7. J. Takahashi, K. Youno, and K. Mizobuchi, Proceedings from Semiconductor Pure Water and Chemical Conference, Los Altos, CA, pp. 110-121 (2004).
8. K. Kawabata Y. Kishi, and R. Thomas, Analytical Chemistry 75(9), 423A, 2003.
9. J.M. Collard, K. Kawabata, Y. Kishi, and R. Thomas, Micro, (1) 39-46, 2002.