Implementing enhanced ICP-MS technology to attain SEMI Grade 5 purity levels

MICRO

Volumn 20, Issue 1, 2002, Pages 39-46

  Collard, Jean Marie ^a   Kawabata, Katsu ^a   Kishi, Yoko ^a   Thomas, Robert ^a  

^a Solvay Interox ^*  (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038598633     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

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2. Book of SEMI Standards (BOSS) (San Jose: SEMI, updated periodically).
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4. S Beres et al., "The Benefits of Electrothermal Vaporization for Minimizing Interferences in ICP-MS, " Spectroscopy 9, no. 1 (1994): 20-26.
5. D Potter et al., "Ultratrace Analysis of Semiconductor Grade Chemicals by ICP-MS, " Analytical Sciences 7 (1991): 467-470.
6. I Feldman et al., "Application of a Hexapole Collision and Reaction Cell in ICP-MS. Part 2. Analytical Figures of Merit and First Applications, " Fresnius Journal of Analytical Chemistry 365 (1999): 422-428.
7. SJ Jiang, RS Houk, and MA Stevens, "Alleviation of Overlap Interferences for Determination of Potassium Isotope Ratios by Inductively Coupled Plasma Mass Spectrometry, " Analytical Chemistry 60, no. 11 (1988): 1217-1221.
8. SD Tanner et al., "The Application of Cold Plasma Conditions for the Determination of Trace Levels of Fe, Ca, K, Na, and Li by ICP-MS, " Atomic Spectroscopy 16, no. 1 (1995): 16-18.
9. P Turner et al., "Interface Studies in the ICP-Mass Spectrometer, " in Plasma Source Mass Spectrometry: Developments and Applications, eds. JG Holland and SD Tanner (London: Royal Society of Chemistry, 1997).
10. U.S. Pat. 6, 140, 638.
11. SEMI Cl-1000-Specifications for Reagents, Section 3.14: Method Validation (San Jose: SEMI, 2000).
12. SEMI C10-0299-Guide for Determination of Method Detection Limits (San Jose: SEMI, 1999).
13. JM Collard, Y Kishi, and C Costanza, "Analytical Method Validation in the Semiconductor Industry Applied to High Purity Hydrogen Peroxide, " in Proceedings of the Semiconductor Pure Water and Chemicals Conference (San Jose: SPWCC, 2001), 190-213.
14. DS Bollinger and AJ Schleisman, "Analysis of High Purity Acids Using a Dynamic Reaction Cell ICP-MS, " Atomic Spectroscopy 20, no. 2 (1999): 60-63.