Grain size and its distribution in NiTi thin films sputter-deposited on heated substrates

Chinese Physics

Volumn 13, Issue 8, 2004, Pages 1315-1319

  Li, Yong Hua ^a,b   Meng, Fan Ling ^a   Qiu, Deng Li ^a   Wang, Yi ^a   Zheng, Wei Tao ^a   Wang, Yu Ming ^a  

^a JILIN UNIVERSITY   (China)

^b NORTHEASTERN UNIVERSITY AT QINHUANGDAO   (China)

Author keywords

Crystalline particle size; NiTi thin film; Substrate temperature

Indexed keywords

ATOMIC FORCE MICROSCOPY; GRAIN SIZE AND SHAPE; NICKEL ALLOYS; PARTICLE SIZE ANALYSIS; SPUTTER DEPOSITION; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS; X RAY SCATTERING;

CRYSTALLINE PARTICLE SIZE; NITI THIN FILMS; SMALL-ANGLE X-RAY SCATTERING; SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 23344439662     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-1963/13/8/023     Document Type: Article

References (27)

1. Kohl M et al 1999 Mater. Sci. Eng. A 273-275 784
2. Kohl M et al 2000 Sensors Actuators 83 214
3. Mathews S et al 1999 Philos. Mag. Lett. 79(5) 265
4. Motohash Y et al 1991 J. Japan Inst. Metals (Japanese) 55 132
5. Ishida A, Takei A and Miyazaki S 1993 Thin Solid Films 228 210
6. Miyazaki S, Hashinaga T and Yumikura K 1995 Smart Mater. SPIE 2442 156
7. Ishida A et al 1995 Mater. Res. Soc. Symp. Proc. 360 381
8. Ishida A et al 1996 Met. Mater. Trans. 27A 3753
9. Miyazaki S, Hashinaga T and Ishida A 1996 Thin Solid Films 281-282 364
10. Wang Y, Lee S and Lee Y 1982 J. Appl. Crystallogr. 15 35
11. Meng C 1991 J. Non-Cryst. Solids 130 107
12. Guinier A and Fournet G 1995 Small-Angle Scattering of X-Rays (New York: Wiley) p115
13. Xu Y et al 2003 Acta Phys. Sin. 52 442 (in Chinese)
14. Xu Y et al 2003 Acta Phys. Sin. 52 635 (in Chinese)
15. Porod G 1951 Kolloid-Z. 124 83
16. Chai Z G et al 2002 Chin. Phys. 11 191
17. Chai Z G, Meng F L and Zhou Q 2001 Acta Phys. Sin. 50 1401 (in Chinese)
18. Koberstein J J, Morra B and Stein R S 1980 J. Appl. Crystallogr. 13 34
19. Meng F L et al 2002 Acta Phys. Sin. 51 2086 (in Chinese)
20. Li Z H et al 2001 Chin. Phys. 10 429
21. Chou P and Turnbull D 1975 J. Non-Cryst. Solids 17 169
22. Meng C F and Wang Y M 1990 J. Non-Cryst Solid 122 41
23. Baur R and Gerold V 1964 Acta Metall. 12 1449
24. Whyte F E 1972 J. Catal. 25 407
25. Meng Z and Wang Q 1996 Acta Phys. Sin. 45 619 (in Chinese)
26. Kikuchi T et al 1998 Philos. Mag. A 78 467
27. Santucci S et al 2000 Thin Solid Films 380 89