Partially coherent spectral transmittance of dielectric thin films with rough surfaces

Journal of Thermophysics and Heat Transfer

Volumn 19, Issue 3, 2005, Pages 360-366

  Lee, B J ^a,b   Khuu, V P ^a,c   Zhang, Z M ^a,b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DIELECTRIC MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED SPECTROMETERS; MULTILAYERS; NUMERICAL ANALYSIS; OPTOELECTRONIC DEVICES; REFRACTIVE INDEX; SEMICONDUCTOR DEVICES; SURFACE ROUGHNESS;

DIELECTRIC THIN FILMS; GEOMETRIC OPTICS; SEMICONDUCTOR PROCESSING; SPECTRAL TRANSMITTANCE;

THIN FILMS;

HEAT TRANSFER;

EID: 23244451210     PISSN: 08878722     EISSN: 15336808     Source Type: Journal    
DOI: 10.2514/1.12512     Document Type: Article

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