High-efficiency focusing waveguide grating coupler with parallelogramic groove profiles

Journal of Lightwave Technology

Volumn 15, Issue 7, 1997, Pages 1142-1147

  Liao, Tingdi ^a   Sheard, Stephen ^a   Li, Ming ^a   Zhu, Jianguo ^b   Prewett, Philip ^b  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

Diffractive optics; Focusing; Grating coupler; Integrated optics; Waveguide lens

Indexed keywords

COMPUTER SIMULATION; DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; ETCHING; FOCUSING; INTEGRATED OPTICS; LENSES; SEMICONDUCTOR DEVICE MANUFACTURE;

DIFFRACTIVE GRATINGS; FOCUSING WAVEGUIDE GRATING COUPLER; PARALLELOGRAMIC GROOVE PROFILES; WAVEGUIDE LENS;

WAVEGUIDE COUPLERS;

EID: 0031175999     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.596959     Document Type: Article

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