Micromachined, reusable shadow mask for integrated optical elements grown by metalorganic chemical vapor deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 5, 1999, Pages 2070-2073

  Peake, G M ^a  

^a University of New Mexico   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22844454924     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590874     Document Type: Article

References (2)

1. G. M. Peake, S. Z. Sun, and S. D. Hersee, J. Electron. Mater. 26, 1134 (1997).
2. L. N. Langley, D. J. Robbins, P. J. Williams, T. J. Reid, I. Moerman, X. Zhang, P. Van Daele, and P. Demeester, Electron. Lett. 32, 738 (1996).