Fabrication of gated nanosize Si-tip arrays for high perveance electron beam applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 583-587

  Choi, S S ^a  

^a SunMoon University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644452716     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590598     Document Type: Article

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