High field characteristics of thin-film metal electrodes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 769-772

  Ma, Xianyun ^a   Muzykov, P G ^a   Sudarshan, T S ^a  

^a The Department of Mechanical Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644448309     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590636     Document Type: Article

References (7)

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5. Xianyun Ma and T. S. Sudarshan, J. Vac. Sci. Technol. B 16, 1174 (1998).
6. Xianyun Ma and T.S. Sudarshan, IVMC'98.
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