Prebreakdown and breakdown investigation of broad area electrodes in the micrometric regime

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1174-1179

  Ma, Xianyun ^a   Sudarshan, T S ^a  

^a UNIVERSITY OF SOUTH CAROLINA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003691703     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590028     Document Type: Article

References (10)

1. Takao Utsami, IEEE Trans. Electron. Devices 38, 2276 (1991).
2. S. Iannazzo, Solid-State Electron. 36, 301 (1993).
3. W. P. Dyke and J. K. Trolan, Phys. Rev. 89, 799 (1953).
4. R. J. Noer, Appl. Phys. A: Solids Surf. 28, 1 (1982).
5. H. C. Miller, IEEE Trans. Dielectr. Electr. Insul. 25, 765 (1990).
6. H. C. Miller, IEEE Trans. Dielectr. Electr. Insul. 26, 949 (1991).
7. R. Latham, High Voltage Vacuum Insulation (Academic, London, 1995).
8. Model 6512 Programmable Electrometer Instruction Mannual (Keithley Instruments Inc., 1994).
9. X. Ma, J. D. Kim, and T. S. Sudarshan, 10th Int. Vacuum Microelectronics Conference, Kyongju, Korea, 1997, pp. 725-729.
10. R. H. Fowler and L. Nordheim, Proc. R. Soc. London, Ser. A 119, 173 (1928).