Atomic hydrogen cleaning of low-index GaAs surfaces

Journal of Crystal Growth

Volumn 282, Issue 1-2, 2005, Pages 1-6

  Khatiri, A ^a   Krzyzewski, T J ^a   McConville, C F ^b   Jones, T S ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

A1. Reflection high energy electron diffraction; A1. Surface processes; A1. Surface structure; A3. Molecular beam epitaxy; B2. Semiconducting III IV materials

Indexed keywords

CRYSTAL GROWTH; DESORPTION; HYDROGEN; MOLECULAR BEAM EPITAXY; MORPHOLOGY; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SURFACE ROUGHNESS; SURFACE STRUCTURE;

SEMICONDUCTING III-IV MATERIALS; SURFACE ORIENTATIONS; SURFACE PROCESSES; THERMAL DESORPTION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 22644443967     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.04.046     Document Type: Article

References (15)

1. S. Ritchie, S.R. Johnsin, C. Lavoie, J.A. Mackenzie, T. Tiedje, and R. Streater Surf. Sci. 374 1997 418
2. T. Sugaya, and M. Kawabe Jpn. J. Appl. Phys. 30 1991 L402
3. M.A. Hafez, and H.E. Elsayed-Ali J. Appl. Phys. 91 2002 1256
4. Y. Morishita, Y. Nomura, S. Goto, M. Yamada, and Y. Katayama Jpn. J. Appl. Phys. 34 1995 L397
5. R.S. Williams, M.J. Ashwin, T.S. Jones, and J.H. Neave J. Appl. Phys. 95 2004 6112
6. M. Adamcyk, T. Pinnington, A. Ballestad, and T. Tiedje Mat. Sci. Eng. B 75 2000 153
7. A. Khatiri, J.M. Ripalda, T.J. Krzyzewski, G.R. Bell, C.F. McConville, and T.S. Jones Surf. Sci. Lett. 548 2004 L1
8. G.R. Bell, N.S. Kaijaks, R.J. Dixon, and C.F. McConville Surf. Sci. 401 1998 125
9. M. Yamada, Y. Ide, and K. Tone Jpn. J. Appl. Phys. 31 1992 L1157
10. S. Sugata, A. Takamori, N. Takado, K. Asakawa, E. Miyauchi, and H. Hashimoto J. Vac. Sci. Technol. B 6 1988 1087
11. C.M. Rouleau, and R.M. Park J. Vac. Sci. Technol. A 11 1993 1792
12. T. Ohashi, Y. Saito, T. Maruyama, and Y. Nanishi J. Crystal Growth 237 2002 1022
13. T. Kikawa, I. Ochiai, and S. Takani Surf. Sci. 316 1994 238
14. H.J. Parry, M.J. Ashwin, J.H. Neave, and T.S. Jones Semicond. Sci. Technol. 17 2002 1209
15. W. Monch Semiconductor Surfaces and Interfaces 2001 Springer Berlin