Kinetic aspects of the formation of aluminium oxide by use of a microwave-induced plasma

Analytical and Bioanalytical Chemistry

Volumn 374, Issue 4, 2002, Pages 720-723

  Quade, A ^a   Steffen, H ^a   Hippler, R ^a   Wulff, H ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

Aluminium; Diffusion; Grazing incidence X ray diffractometry (GIXRD); Grazing incidence X ray reflectometry (GIXR); Plasma oxidation

Indexed keywords

ACTIVATION ENERGY; DIFFUSION; MICROWAVES; OXIDES; STOICHIOMETRY; THICKNESS MEASUREMENT; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

KINETIC DATA;

ALUMINUM COMPOUNDS;

ALUMINUM OXIDE; OXYGEN;

CALCULATION; CONFERENCE PAPER; DIFFUSION; DIFFUSION COEFFICIENT; ENERGY; INFRARED SPECTROSCOPY; KINETICS; MICROWAVE RADIATION; MOLECULAR DYNAMICS; OXIDATION; PLASMA; PRESSURE; QUANTITATIVE ANALYSIS; REFLECTOMETRY; STOICHIOMETRY; TEMPERATURE DEPENDENCE; X RAY ANALYSIS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 2242468442     PISSN: 16182642     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00216-002-1515-4     Document Type: Conference Paper

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