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Volumn 88, Issue 1-3, 1997, Pages 103-111
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Surface characterization of thin layers of aluminium oxide
a,b a c |
Author keywords
Aluminium oxide; Surface characterization; Thin films
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Indexed keywords
ALUMINA;
ALUMINUM ALLOYS;
ATOMIC FORCE MICROSCOPY;
AUGER ELECTRON SPECTROSCOPY;
OXIDATION;
OXIDES;
SURFACE STRUCTURE;
MICROHARDNESS;
OXIDE THIN FILMS;
SURFACE TOPOGRAPHY;
THIN FILMS;
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EID: 0030838129
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(95)02757-2 Document Type: Article |
Times cited : (59)
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References (25)
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