Nanoimprint technology and applications

Journal of Photopolymer Science and Technology

Volumn 18, Issue 4, 2005, Pages 523-524

  Miyauchi, Akihiro ^a  

^a HITACHI LTD   (Japan)

Author keywords

Nanoimprint; Nanopillar; Nanoprint

Indexed keywords

EID: 22144495402     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.18.523     Document Type: Article

References (4)

1. S. Y. Chou, P. R. Krauss and P. J. Renstrom, Appl. Phys. Lett., 67 (1995) 3114.
2. M. Colburn, S. Johnson, M. Stewart, S. Damle, T. Bailey, B.J. Choi, M. Wedlake, T. Michaelson, S.V. Sreenivasan, J. Ekerdt, C.G. Willson, Proceedings of the SPIE's 24th International Symposium on Microlithography: Emerging Lithographic Technologies III, 3676, Part One, (1999) 379.
3. A. Miyauchi, IEEE Internationa Magnetics Conference 2005, BB-04.
4. K. Kuwabara, M. Ogino, S. Motowaki and A. Miyauchi, Microelectronic Engineering, 73-74C, (2004) 752-756.