Optimized flexural hinges for compliant micromechanisms

Analog Integrated Circuits and Signal Processing

Volumn 44, Issue 2, 2005, Pages 163-174

  De Bona, F ^a   Munteanu, M Gh ^a,b  

^a UNIVERSITY OF UDINE   (Italy)

^b TRANSILVANIA UNIVERSITY OF BRASOV   (Romania)

Author keywords

Compliant micromechanisms; FEM; Lithographic Microfabrication; Shape optimization

Indexed keywords

ALGORITHMS; COMPOSITE MICROMECHANICS; DEFORMATION; FINITE ELEMENT METHOD; LITHOGRAPHY; MICROSTRUCTURE; OPTIMIZATION;

COMPLIANT MICROMECHANISMS; LITHOGRAPHIC MICROFABRICATION; OPTIMIZATION TOOLBOX; SHAPE OPTIMIZATION;

HINGES;

EID: 22144487391     PISSN: 09251030     EISSN: 15731979     Source Type: Journal    
DOI: 10.1007/s10470-005-2597-7     Document Type: Conference Paper

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