Improved simulated annealing with step width adaptation for Langmuir probe tuning

Engineering Optimization

Volumn 37, Issue 5, 2005, Pages 463-477

  Nolle, Lars ^a   Goodyear, Alec ^b   Hopgood, Adrian A ^a   Picton, Phil D ^c   Braithwaite, Nicholas St J ^b  

^a NOTTINGHAM TRENT UNIVERSITY   (United Kingdom)

^b OPEN UNIVERSITY   (United Kingdom)

^c UNIVERSITY OF NORTHAMPTON   (United Kingdom)

Author keywords

Langmuir probe; Simulated annealing; Step width adaptation

Indexed keywords

ALGORITHMS; CONSTRAINT THEORY; DEPOSITION; ELECTRIC FIELDS; ELECTROSTATICS; FLOW OF FLUIDS; FOURIER TRANSFORMS; ITERATIVE METHODS; WAVEFORM ANALYSIS;

LANGMUIR PROBE; PLASMA PROCESSING; RADIO-FREQUENCY (RF); STEP WIDTH ADAPTATION;

SIMULATED ANNEALING;

EID: 22144481282     PISSN: 0305215X     EISSN: None     Source Type: Journal    
DOI: 10.1080/03052150500100403     Document Type: Article

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