Silicon wet etch anisotropy: Analysis of the impact of {111}-, {110}-, {100}-terrace widths

Sensors and Materials

Volumn 17, Issue 4, 2005, Pages 199-210

  Stateikina, Irina ^a   Landsberger, Leslie M ^a   Kahrizi, Mojtaba ^a   Hoque, Nazmul ^a   Rossokhaty, Victor ^a  

^a Dept of Electrical and Computer Engineering   (Canada)

Author keywords

Anisotropic etching of silicon; Orientation of crystal facets; Step based model; TMAH

Indexed keywords

EID: 22144448944     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (9)

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