Integrated PNZT structures for MEMS gyroscope

Integrated Ferroelectrics

Volumn 63, Issue , 2004, Pages 49-54

  Nistorica, Corina ^a   Zhang, Jian ^a   Padmini, P ^a   Kotru, Sushma ^a   Pandey, R K ^a  

^a The Aerospace Engineering and Mechanics Department   (United States)

Author keywords

Asymmetry; Ferroelectric; Piezoelectric; PNZT films; Poling

Indexed keywords

ANNEALING; CRYSTAL STRUCTURE; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR GROWTH; SOL-GELS; THIN FILMS;

ACTUATED CANTILEVERS; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC RESPONSE; PNZT FILMS;

GYROSCOPES;

EID: 22144442341     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490458603     Document Type: Article

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