Classifier combination for wafer segmentation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5679, Issue , 2005, Pages 36-43

  Bourgeat, Pierrick ^b   Meriaudeau, Fabrice ^a  

^a UNIVERSITÉ DE BOURGOGNE   (France)

^b CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; DIGITAL FILTERS; FEATURE EXTRACTION; HOLOGRAPHY; IMAGE ANALYSIS; INSPECTION; MICROSCOPIC EXAMINATION; TOPOLOGY;

DEFECT DETECTION; DIGITAL HOLOGRAMS; DIRECT-TO-DIRECT HOLOGRAPHY (DDH); PATTERNED WAFERS;

IMAGE SEGMENTATION;

EID: 21844474305     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.592109     Document Type: Conference Paper

References (10)

1. C. E. Thomas Jr., et Al. "Direct to digital holography for high aspect ratio inspection of semiconductor wafers.", 2003 International Conference on Characterization and Metrology for ULSI Technology, Proc. AIP v. 683, Austin, pp. 254-270, March 2003.
2. P. Bourgeat, F. Meriaudeau, P. Gorria, K.W. Tobin, "Content-based segmentation of patterned wafer for automatic threshold determination", Proc. SPIE, Vol. 5011, Santa Clara, pp. 183-189, January 2003.
3. P. Bourgeat, F. Meriaudeau, K.W. Tobin, P. Gorria, "Patterned wafer segmentation", Quality Control by Artificial Vision, Proc. SPIE v. 5732, Gatlinburg, pp. 36-44, May 2003.
4. K.W. Tobin, "Inspection in Semiconductor Manufacturing", Webster's Encyclopedia of Electrical and Electronic Engineering, vol. 10, pp. 242-262, Wiley & Sons, NY, NY, 1999.
5. P. Dutilleux "An Implementation of the algorithme à trous to compute the wavelet transform", in Wavelets: Time Frequency Methods and Phase Space. Berlin: Springer IPTI, pp 298-304, 1989.
6. P. Bourgeat, F. Meriaudeau, P. Gorria, K. Tobin, F. Truchetet, "Features extraction on complex images", IEEE Conference, ICIP 2004, 24-27 October 2004, Singapor.
7. J. Miteran, P. Gorria, M. Robert, "Classification géométrique par polytopes de contraintes. Performances et intégration", Traitement du Signal, vol. 11, n°5, pp 393-408, 1994.
8. P. Bourgeat, F. Meriaudeau, P. Gorria, K. Tobin, Content based segmentation of patterned wafers" Journal of Electronic Imaging, Vol (13), N°13, pp. 428-435, July 2004.
9. V.N. Vapnik, "The nature of statistical learning theory". New York: Springer Verlag, 1995.
10. P. Bourgeat, "Segmentation d'images de semi-conducteurs appliquée à la détection de défauts", PhD thesis, Université de Bourgogne, Juillet 2004.