Content based segmentation of patterned wafers

Journal of Electronic Imaging

Volumn 13, Issue 3, 2004, Pages 428-435

  Bourgeat, Pierrick ^a,b   Meriaudeau, Fabrice ^b   Tobin, Kenneth W ^a   Gorria, Patrick ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITÉ DE BOURGOGNE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECT DETECTION; IMAGE CORRECTION; IMAGE PREPROCESSING; OPTICAL INSPECTION TOOL; PATTERNED WAFERS;

ALGORITHMS; DEFECTS; ELECTRONIC STRUCTURE; FEATURE EXTRACTION; SPURIOUS SIGNAL NOISE; TEXTURES; WAVELET TRANSFORMS;

IMAGE SEGMENTATION;

EID: 4944222328     PISSN: 10179909     EISSN: 1560229X     Source Type: Journal    
DOI: 10.1117/1.1762518     Document Type: Article

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