Micromachining with ultrashort pulses of light

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5706, Issue , 2005, Pages 69-75

  Clark, William ^a   Walker, Larry ^a  

^a Clark MXR Inc   (United States)

Author keywords

Ablation; Direct write; Femtosecond; Microfabrication; Nanofabrication; Nanomachining; Nanostructuring; Ultrafast; Ultrashort; Yword list: Micromachining

Indexed keywords

LASER ABLATION; LASER PULSES; MICROMACHINING; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SURFACE PROPERTIES; THERMAL CONDUCTIVITY; THERMAL DIFFUSION;

DIRECT-WRITE; FETMOSECOND; MICROFABRICATION; NANOMACHINING; NANOSTRUCTURING; ULTRAFAST;

ULTRASHORT PULSES;

EID: 21844472489     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.601665     Document Type: Conference Paper

References (9)

1. Ajit P. Joglekar, Hsiao-hua Liu, Edgar Meyhoefer, Gerard Mourou, and Alan J. Hunt "Optics at critical intensity: Applications to Nanomorphing," PNAS, 101 5856-5861 (2004)
2. Paul Mannion, Gerald M. O'Connor, Ed Coyne, Hellen Howard, and Thomas J. Glynn, "The onset of phase explosion and the role of damage accumulation in ultrafast laser processing of common metals in air" Proceedings of SPIE High-Power Laser Ablation V. edited by Claude R. Phipps, Vol. 5448 961-972 (SPIE, Bellingham, WA, (2004)
3. E. G. Gamaly, A. V. Rode, O.Uteza, V. Kolev, B. Luther-Davies, T. Bauer, J. Koch, F. Korte, and B. N. Chichkov, "Control over a phase state of the laser plume ablated by femtosecond laser: Spatial pulse shaping" Journal of Applied Physics, 95 No. 5, 2250-2257 (1 March 2004)
4. A. E. Wynne, B. C. Stuart, "Rate dependence of short-pulse laser ablation of metals in air and vacuum," Appl. Phys. A 76 373-378 (2003)
5. A. Borowiec, M. Mackenzie, G. C. Weatherly, H. K. Haugen, "Femtosecond laser pulse ablation of GaAs and InP: studies utilizing scanning and transmission electron microscopy," Appl. Phys. A 77 411-417 (2003)
6. Chris B. Schaffer, Andre Brodeur, and Eric Mazur, "Laser-induced breakdown and damage in bulk transpartent materials induced by tightly focused femtosecond laser pulses," Meas. Sci. Technol. 12 1784-1794 (2001)
7. A. Borowiec, M. Mackenzie, G.C. Weatherly, H.K. Haugen, "Transmission and scanning electron microscopy studies of single femtosecond-laser-pulse ablation of silicon," Appl. Phys. A, 76 201-207 (2003)
8. B. Luther-Davies, E. Gamaly, A. Rode, V. Kolev, N. Madsen, M. Dueling, J. Giesekus, "Applications of High Power Slow Mode-locked Laser for Ablation and Non-linear Optics," Proceedings of SPIE High-Power Laser Ablation V. edited by Claude R. Phipps, Vol. 5448 432-440 (SPIE, Bellingham, WA, (2004)
9. D. Ashkenasi, M. Lorenz, R. Stoian, A. Rosenfeld, "Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation," Applied Surface Science 150 101-106 (1999)