Application of composite hardness models to copper thin film hardness measurement

Surface and Coatings Technology

Volumn 199, Issue 1, 2005, Pages 32-37

  Beegan, D ^a   Laugier, Michael T ^a  

^a UNIVERSITY OF LIMERICK   (Ireland)

Author keywords

Composite hardness models; Copper; Nanoindentation

Indexed keywords

COMPOSITE MATERIALS; COPPER; DATA REDUCTION; HARDNESS; INDENTATION; MATHEMATICAL MODELS; OXIDATION; SILICON; SUBSTRATES; THICKNESS MEASUREMENT;

COMPOSITE HARDNESS MODELS; NANOINDENTATION; PUCHI-CABRERA MODEL; THIN FILM HARDNESS;

THIN FILMS;

COPPER;

EID: 21844453372     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.04.014     Document Type: Article

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