Measurement of the thermal conductivity of undoped polysilicon thin film over 300K to 400K

International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT

Volumn 3, Issue , 2004, Pages 2190-2193

  Lv, Zhiohao ^a   Yuan, Jiahui ^a   Tian, Lilin ^a   Liu, Lilian ^a   Li, Zhijian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; ELECTRIC RESISTANCE; HEAT TRANSFER; LIQUID CRYSTAL DISPLAYS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; THERMAL CONDUCTIVITY; VOLTAGE CONTROL;

CONTACT RESISTANCE; JOULE HEATING; MEASUREMENT DATA; POLYSILICON THIN FILMS;

THIN FILMS;

EID: 21644467755     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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