Spherical φ 1mm SAW device based on ball semiconductor/MEMS technology

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2004, Pages 918-921

  Sim, Dongyoun ^a   Mizukami, Akio ^b   Akao, Shingo ^c   Satoh, Ichitaro ^d   Bryan, Maxey ^a   Takeda, Nobuo ^a   Ohgi, Tuneo ^c   Nakaso, Noritaka ^c   Miyagishi, Tetsusya ^d   Tanaka, Hidekazu ^d   Fukiura, Ken ^d   Kazato, Hirohiko ^d   Watanabe, Hideyuki ^b   Mihara, Tsuyoshi ^b   Yamanaka, Kazushi ^b  

^a Ball Semiconductor Inc   (United States)

^b TOHOKU UNIVERSITY   (Japan)

^c TOPPAN PRINTING CO LTD   (Japan)

^d YAMATAKE CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; CHEMICAL SENSORS; ELECTROMAGNETIC WAVE ATTENUATION; HYDROGEN; MICROELECTROMECHANICAL DEVICES; NITROGEN; PIEZOELECTRIC MATERIALS; QUARTZ; SEMICONDUCTOR DEVICE MANUFACTURE; SINGLE CRYSTALS; TRANSDUCERS;

DELAY TIME RESPONSES; HYDROGEN SENSORS; INTERDIGITAL TRANSDUCERS (IDT); SIGNAL VARIATIONS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 21644453766     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. A.Ishikawa, Extended Abstract of the 1998 Int. Conf. On Solid State Devices and Materials, pp.428-429, Sep. 1998.
2. N. Takeda, "Ball Semiconductor Technology and Its Application to MEMS", IEEE MEMS 2000, Mivazaki, pp. 11-16, 2000.
3. K. Yamanaka, H. Cho and Y. Tsukahara, "Precise velocity measurement of surface acoustic waves on a bearing ball", Appl. Phys. Lett. Vol. 76, pp.2797-2799, 2000.
4. S.Ishikawa, Y. Tsukahara, N. Nakaso, H. Cho and K. Yamanaka, "Surface Acoustic Waves on a Sphere-Analysis of Propagation Using Laser Ultrasonics", Jpn. J. Appl. Phys. 40, pp3623-3627, 2001.
5. K. Yamanaka, S. Ishikawa, N. Nakaso, N. Takeda, T Mihara and Y. Tsukahara, Proc. 2003 IEEE Ultrason. Symp. 299 (2004).