High performance piezoelectric films for high frequency MEMS ultrasonic transducers

Proceedings - IEEE Ultrasonics Symposium

Volumn 3, Issue , 2004, Pages 1954-1957

  Zhang, Q Q ^a   Djuth, F T ^a   Zhou, Q F ^b   Shung, K K ^b  

^a Geospace Research Inc   (United States)

^b University of Southern California ^*  (United States)

Author keywords

High frequency transducer; PYbN PT

Indexed keywords

CURIE TEMPERATURE; HIGH FREQUENCY TRANSDUCERS; METAL ORGANIC DECOMPOSITION (MOD); PRECURSOR SOLUTIONS;

DECOMPOSITION; LANTHANUM COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; SEMICONDUCTING SILICON; SOL-GELS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ULTRASONIC TRANSDUCERS;

EID: 21644448888     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2004.1418215     Document Type: Conference Paper

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