An arc generator of a broad plasma stream

Instruments and Experimental Techniques

Volumn 43, Issue 3, 2000, Pages 375-377

  Vintizenko, L G ^a   Koval', N N ^a   Shchanin, P M ^a   Tolkachev, V S ^a  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2142839561     PISSN: 00204412     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02759038     Document Type: Article

References (3)

1. Danilin, B.S. and Kireev, V.Yu., Primenenie nizkotemperaturnoi plazmy dlya travleniya i ochistki materialov (Application of Low-Temperature Plasma for Etching and Cleaning of Materials), Moscow: Energoatomizdat, 1987.
2. Borisov, D.P., Koval', N.N., and Shchanin, P.M., Izv. Vyssh. Uchebn. Zaved., Fiz., 1994, no. 3, p. 115.
3. Borisov, D.P., Koval', N.N., Kovsharov, N.F., et al., Abstracts of Papers, XVII Int. Symp. on Discharge and Electrical Insul. in Vacuum, Berkeley, USA, 1996, pp. 881-883.