Packaging and Characterization of Miniaturized Spectral Sensing Devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5346, Issue , 2004, Pages 134-140

  Otto, Thomas ^a   Saupe, Ray ^b   Stock, Volker ^c   Fritzsch, Uwe ^c   Bruch, Reinhard ^d   Gessner, Thomas ^a,b  

^a Fraunhofer Institute Reliability and Microintegration   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c Colour Control Farbmesstechnik GmbH ^*  (Germany)

^d UNIVERSITY OF NEVADA   (United States)

Author keywords

Infrared; MOEMS; Packaging; Spectral Sensing; Spectrometer

Indexed keywords

COST EFFECTIVENESS; DIODES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GAS CHROMATOGRAPHY; HIGH PRESSURE LIQUID CHROMATOGRAPHY; INFRARED SPECTROSCOPY; MICROELECTROMECHANICAL DEVICES; OPTICAL SYSTEMS; SPECTROMETERS; THIN FILMS;

INTEGRATED DIFFRACTION GRATING; MICRO MIRRORS; SPECTRAL SENSING;

OPTICAL DEVICES;

EID: 2142832124     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.530522     Document Type: Conference Paper

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