The Use of Holographic and Diffractive Optics for Optimized Machine Vision Illumination for Critical Dimension Inspection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5265, Issue , 2004, Pages 16-23

  Lizotte, Todd ^a   Ohar, Orest ^a  

^a Unit #6   (United States)

Author keywords

Critical; Dimension; DOE; HOE; Holographic; Illuminator; Inspection; LED

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; DIFFRACTIVE OPTICS; GLASS; HOLOGRAPHIC OPTICAL ELEMENTS; INSPECTION; LIGHT EMITTING DIODES; OPTICAL WAVEGUIDES; SPECTRUM ANALYSIS;

CRITICAL DIMENSIONS; DOE; FROSTED GLASS PLATES; ILLUMINATORS;

COMPUTER VISION;

EID: 2142762650     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.512000     Document Type: Conference Paper

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