Deep wet etching on fused silica material for fiber optic sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5342, Issue , 2004, Pages 128-136

  Chen, Xiaopei ^a   Yu, Bing ^a   Zhu, Yizheng ^a   Wang, Anbo ^a  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

Deep wet etching; Fiber optic sensors; Fused silica; Optical fibers

Indexed keywords

BUFFERED HYDROGEN FLUORIDE (BHF); DEEP WET ETCHING; FUSED SILICA DIAPHRAGMS; LASER INDUCED BACK SIDE ETCH (LIBWE);

FIBER OPTIC SENSORS; FUSED SILICA; LIGHT INTERFERENCE; LIGHT REFLECTION; MICROSTRUCTURE; SURFACE ROUGHNESS;

ETCHING;

EID: 2142761178     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524693     Document Type: Conference Paper

References (11)

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