LIGA fabricated 19-element threshold accelerometer array

Sensors and Actuators, A: Physical

Volumn 112, Issue 1, 2004, Pages 175-183

  McNamara, Shamus ^a,b   Gianchandani, Yogesh B ^a,b  

^a University of Wisconsin Madison   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Accelerometer; Bi directional sensing; Spring constant

Indexed keywords

ACCELERATION; CAPACITANCE; ELASTIC MODULI; ELECTRODES; ELECTROSTATIC ACTUATORS; FABRICATION; NICKEL PLATING; SENSORS; WELDING;

BI-DIRECTIONAL SENSING; PROOF MASS; SPRING CONSTANT; THRESHOLD ACCELEROMETER ARRAY;

ACCELEROMETERS;

EID: 2142724764     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.064     Document Type: Article

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