Approach for a three-dimensional on-chip quantification by secondary-ion mass spectrometry analysis

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 445-451

  Gnaser, Hubert ^a  

^a University of Koblenz Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2142675110     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580872     Document Type: Article

References (24)

1. R. G. Wilson, F. A. Stevie, and C. W. Magee, Secondary Ion Mass Spectrometry (Wiley, New York, 1989).
2. F. A. Stevie, G. W. Cochran, P. M. Kahora, W. A. Russell, N. Linde, D. M. Wroge, A. M. Garcia, and M. Geva, J. Vac. Sci. Technol. A 10, 2880 (1992).
3. W. C. Harris, H. E. Smith, A. J. Pelillo, and J. L. Beagle, J. Vac. Sci. Technol. A 10, 2887 (1992).
4. F. G. Rüdenauer, Anal. Chim. Acta 297, 197 (1994); J. M. Chabala, K. K. Soni, J. Li, K. L. Gavrilov, and R. Levi-Setti, Int. J. Mass Spectrom. Ion Proc. 143, 191 (1995).
5. F. G. Rüdenauer, Anal. Chim. Acta 297, 197 (1994); J. M. Chabala, K. K. Soni, J. Li, K. L. Gavrilov, and R. Levi-Setti, Int. J. Mass Spectrom. Ion Proc. 143, 191 (1995).
6. J. B. Clegg, J. Vac. Sci. Technol. A 13, 143 (1995).
7. A. Benninghoven, F. G. Rüdenauer, and H. W. Werner, in Secondary Ion Mass Spectrometry (Wiley, New York, 1987).
8. See, for example, Secondary Ion Mass Spectrometry SIMS IX, edited by A. Benninghoven, Y. Nihei, R. Shimizu, and H. W. Werner (Wiley, Chichester, 1994), pp. 377-425.
9. Y. Gao, J. Appl. Phys. 64, 3760 (1988).
10. C. W. Magee, W. L. Harrington, and E. M. Botnick, Int. J. Mass Spectrom. Ion Proc. 103, 45 (1990).
11. H. Gnaser and H. Oechsner, Fresenius J. Anal. Chem. 341, 54 (1991); Surf. Interface Anal. 17, 646 (1991).
12. H. Gnaser and H. Oechsner, Fresenius J. Anal. Chem. 341, 54 (1991); Surf. Interface Anal. 17, 646 (1991).
13. K. Wittmaack, Nucl. Instrum. Methods Phys. Res. B 64, 621 (1992).
14. H. Gnaser, J. Vac. Sci. Technol. A 12, 452 (1994).
15. H. Gnaser and H. Oechsner, Surf. Sci. Lett. 302, L289 (1994).
16. W. Bock, H. Gnaser, and H. Oechsner, Anal. Chim. Acta 297, 277 (1994).
17. K. Wittmaack, Nucl. Instrum. Methods Phys. Res. B 85, 374 (1994).
18. H. Gnaser, Surf. Sci. 342, 319 (1995).
19. Y. Marie, Y. Gao, F. Saldi, and H. N. Migeon, Surf. Interface Anal. 23, 38 (1995).
20. H. N. Migeon, C. Le Pipec, and J. J. Le Goux, in Secondary Ion Mass Spectrometry SIMS V, edited by A. Benninghoven, R. J. Colton, D. S. Simons, and H. W. Werner (Springer, Berlin, 1986), p. 155.
21. D. Behammer, L. Vescan, R. Loo, J. Moers, U. Zastrow, H. Lüth, and T. Grabolla, Proceedings of the 26th European Solid State Device Conference (in press).
22. H. Gnaser, Surf. Interface Anal. 24, 483 (1996).
23. Y. Homma, Y. Higashi, T. Maruo, C. Maekawa, and S. Ochiai, in Ref. 7, p. 398.
24. K. Wittmaack, in Secondary Ion Mass Spectrometry SIMS X, edited by A. Benninghoven, B. Hagenhoff, and H. W. Werner (Wiley, Chichester, 1997), p. 39.