Multiscale roughness of MEMS surfaces

Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004

Volumn , Issue PART A, 2004, Pages 133-139

  Bora, Can K ^a   Plesha, Michael E ^a   Flater, Erin E ^a   Street, Mark D ^a   Carpick, Robert W ^a   Redmond, James M ^b  

^a University of Wisconsin Madison   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Asperity; Fractal; Multiscale; Roughness; Summit; Surface

Indexed keywords

APPROXIMATION THEORY; ATOMIC FORCE MICROSCOPY; FRACTALS; FRICTION; STATISTICAL METHODS; SURFACE PHENOMENA; SURFACE ROUGHNESS;

ASPERITY; MULTISCALE; MULTISCALE ROUGHNESS; SUMMIT; SURFACE;

MICROELECTROMECHANICAL DEVICES;

EID: 21244500588     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/trib2004-64370     Document Type: Conference Paper

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