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Volumn 249, Issue 1-4, 2005, Pages 354-361
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Impact of laser scribing for efficient device separation of LED components
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Author keywords
Laser dicing; Laser scribing; LEDs; Sapphire scribing; UV wavelengths
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Indexed keywords
FREQUENCIES;
LASER ABLATION;
LASER APPLICATIONS;
LASER BEAMS;
LEAKAGE CURRENTS;
LIGHT EMITTING DIODES;
PHOTONS;
SAPPHIRE;
SILICA;
LASER DICING;
LASER SCRIBING;
SAPPHIRE SCRIBING;
UV WAVELENGTHS;
SOLID STATE LASERS;
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EID: 21244471086
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2004.12.033 Document Type: Article |
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Times cited : (25)
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References (5)
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