Comparative investigations of structure and properties of BCN coatings deposited by thermal and plasma-enhanced CVD

Analytical and Bioanalytical Chemistry

Volumn 375, Issue 7, 2003, Pages 884-890

  Stockel S ^a   Weise, K ^a   Thamm, T ^a   Korner K U ^a   Dietrich, D ^a   Marx, G ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

BCN; Chemical vapour deposition (CVD); Coatings; Hardness; Structural properties

Indexed keywords

BORON COMPOUNDS; COMPOSITION EFFECTS; DIFFERENTIAL THERMAL ANALYSIS; HARDNESS; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

BCN; CARBON CONTENT; CHEMICAL VAPOR DEPOSITION (CVD); STRUCTURAL PROPERTIES;

COATINGS;

CONFERENCE PAPER;

EID: 21244465153     PISSN: 16182642     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00216-002-1724-x     Document Type: Conference Paper

References (10)

1. Riedel R (1994) Adv Mater 6 (7/8):549-560
2. Erhardt H (1995) Surf Coat Technol 74-75:29-35
3. Weise K, Stöckel S, Marx G (1999) In: Dimigen H, Paatsch W (eds) Werkstoffwoche 98. Wiley-VCH, vol IX, Sympl 1:121-126
4. Dietrich D, Roll U, Stöckel S, Weise K, Marx G (2002) Anal Bioanal Chem (in press)
5. Stöckel S, Weise K, Dietrich D, Thamm T, Braun M, Cremer R, Neuschütz D, Marx G (2002) Thin Solid Films (in press)
6. Marx G, Körner KU, Heger P (2001) Steel Res 72 (11/12):518-521
7. Thamm T, Baumann W, Dietrich D, Meyer N, Stöckel S, Marx G (2001) Phys Chem Chem Phys 3:5150-5153
8. Geick R, Perry CH, Rupprecht G (1966) Phys Rev 146:543-547
9. Rozenberg AS, Sinenko YA, Chukanov NV (1993) J Mater Sci 28:5675-5678
10. Kuhr M, Reinke S, Kulisch W (1995) Diamond Relat Mater 4:375-380