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Volumn , Issue , 2004, Pages 237-242

Fabrication of microfluidic chip and Its application

Author keywords

Electroforming; Microfluidic Chip; UV LIGA SU 8 Photoresist

Indexed keywords

BIOMEDICAL ENGINEERING; CHEMICAL ANALYSIS; COMPUTER CONTROL; DNA; ELECTROFORMING; FABRICATION; GENES; IMAGE PROCESSING; MICROSTRUCTURE; PHOTORESISTS; POLYMETHYL METHACRYLATES; PROTEINS; SUBSTRATES;

EID: 21244461954     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (3)

References (11)
  • 1
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    • Che-Hsin Lin, Gwo-Bin Lee, Shu-Hui Chen, Guan-Liang Chang, Micro capillary electrophoresis chips integrated with buried SU-8/SOG optical waveguides for bio-analytical applications, Sensors and Actuators A 107 (2003) 125-131
    • (2003) Sensors and Actuators A , vol.107 , pp. 125-131
    • Lin, C.-H.1    Lee, G.-B.2    Chen, S.-H.3    Chang, G.-L.4
  • 2
    • 2542437226 scopus 로고    scopus 로고
    • Fabrication of large SU-8 mold with high aspect ratio microchannels by UV exposure dose reduction
    • Mary B. Chan-Park, Jun Zhang, Yehai Yan, C.Y. Yue, Fabrication of large SU-8 mold with high aspect ratio microchannels by UV exposure dose reduction, Sensors and Actuators B 101 (2004) 175-182
    • (2004) Sensors and Actuators B , vol.101 , pp. 175-182
    • Chan-Park, M.B.1    Zhang, J.2    Yan, Y.3    Yue, C.Y.4
  • 3
    • 0037060168 scopus 로고    scopus 로고
    • REVIEW Polymer microfluidic devices
    • Holger Becker, Laurie E. Locascio, REVIEW Polymer microfluidic devices, Talanta 56 (2002) 267-287
    • (2002) Talanta , vol.56 , pp. 267-287
    • Becker, H.1    Locascio, L.E.2
  • 4
    • 0034276012 scopus 로고    scopus 로고
    • UV-LIGA process for high aspect ratio structure using stress barrier and C-shaped etch hole
    • Hyun-Kee Chang, Yong-Kweon Kim, UV-LIGA process for high aspect ratio structure using stress barrier and C-shaped etch hole, Sensors and Actuators 84 (2000) 342-350
    • (2000) Sensors and Actuators , vol.84 , pp. 342-350
    • Chang, H.-K.1    Kim, Y.-K.2
  • 5
    • 0035971924 scopus 로고    scopus 로고
    • Microfabrication plastic chips by hot embossing methods and their application for DNA separation and detection
    • Gwo-Bin Lee, Shu-Hui Chen, Guan-Ruey Huang, Wang-Chou Sung, Yen-Heng Lin, Microfabrication plastic chips by hot embossing methods and their application for DNA separation and detection, Sensors and Actuators B 75(2001) 142-148
    • (2001) Sensors and Actuators B , vol.75 , pp. 142-148
    • Lee, G.-B.1    Chen, S.-H.2    Huang, G.-R.3    Sung, W.-C.4    Lin, Y.-H.5
  • 6
    • 0037023309 scopus 로고    scopus 로고
    • Capillary electrophoresis-electrochemistry microfluidic system for the determination of organic peroxides
    • Joseph Wang, Alberto Escarpa, Martin Pumera, Jason Feldman, Capillary electrophoresis-electrochemistry microfluidic system for the determination of organic peroxides, Journal of Chromatography A, 952 (2002) 249-254
    • (2002) Journal of Chromatography A , vol.952 , pp. 249-254
    • Wang, J.1    Escarpa, A.2    Pumera, M.3    Feldman, J.4
  • 7
    • 0033362508 scopus 로고    scopus 로고
    • Fabrication of a 3D differential-capacitive acceleration sensor by UV-LIGA
    • Wenmin Qu, Christian Wenzel, Gerald Gerlach, Fabrication of a 3D differential-capacitive acceleration sensor by UV-LIGA, Sensors and Actuators 77 (1999), 14-20
    • (1999) Sensors and Actuators , vol.77 , pp. 14-20
    • Qu, W.1    Wenzel, C.2    Gerlach, G.3
  • 8
    • 0036643859 scopus 로고    scopus 로고
    • Removal of SU-8 photoresist for thick film applications
    • Paul M. Dentinger, W. Miles Clift, Steven H. Goods, Removal of SU-8 photoresist for thick film applications, Microelectronic Engineering 61-62 (2002) 993-1000
    • (2002) Microelectronic Engineering , vol.61-62 , pp. 993-1000
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  • 9
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    • (2003) Sensors and Actuators A , vol.103 , pp. 64-69
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  • 10
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.