Investigation of RuO2/Ta2O5 thin film evolution by thermogravimetry combined with mass spectrometry

Thin Solid Films

Volumn 485, Issue 1-2, 2005, Pages 90-94

  Kristóf, János ^a   Szilágyi, Tamás ^a   Horváth, Erzsébet ^a   Frost, Ray L ^b  

^a UNIVERSITY OF PANNONIA   (Hungary)

^b QUEENSLAND UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Fourier transform infrared spectroscopy (FTIR); Oxides; Ruthenium; Tantalum

Indexed keywords

ALCOHOLS; COMBUSTION; DYNAMIC RANDOM ACCESS STORAGE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GELS; MASS SPECTROMETRY; OXIDES; RUTHENIUM; RUTHENIUM COMPOUNDS; TANTALUM; TANTALUM COMPOUNDS; THERMOGRAVIMETRIC ANALYSIS;

FILM EVOLUTION; LOW TEMPERATURE COMBUSTION; RUTILE STRUCTURE; SURFACE ANALYSIS;

THIN FILMS;

EID: 21244451015     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.03.037     Document Type: Article

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