Development of a 3-DOF silicon piezoresistive micro accelerometer

Proceedings of the 2004 International Symposium on Micro-NanoMechatronics and Human Science, MHS2004; The Fourth Symposium 'Micro-NanoMechatronics for and Information-Based Society' The 21st Century

Volumn , Issue , 2004, Pages 271-276

  Dao, Dzung Viet ^a   Okada, Shigeya ^b   Van Dau, Thanh ^a   Toriyama, Toshiyuhi ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b Research Division   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CERAMIC MATERIALS; DEGREES OF FREEDOM (MECHANICS); MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; NAVIGATION SYSTEMS; SEISMOLOGY; SILICON; VIDEO CAMERAS;

PIEZORESISTIVE ACCELEROMETERS; PIEZORESISTIVE EFFECT; SEISMIC MASS; THREE DIMENSIONAL (3D) MODEL;

ACCELEROMETERS;

EID: 21244442696     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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