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Applied Surface Science

Volumn 249, Issue 1-4, 2005, Pages 60-64

Transparent oxygen impermeable AlO x thin films on polycarbonate deposited by reactive ion beam sputtering

(4) Seong, Jin Wook a Kim, Sang Mun b Choi, Daiwon c Yoon, K H d

a Samsung SDI (South Korea)

b Korea Institute of Science and Technology (South Korea)

c CARNEGIE MELLON UNIVERSITY (United States)

d Yonsei University (South Korea)

Author keywords

AlO x thin films; Oxygen partial pressure; Oxygen transmission rate (OTR); Reactive ion beam sputtering (RIBS); Stoichiometric ratio

Indexed keywords

ALUMINUM COMPOUNDS; MECHANICAL PERMEABILITY; OXYGEN; PARTIAL PRESSURE; POLYCARBONATES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; STOICHIOMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

ALOX THIN FILMS; OXYGEN PARTIAL PRESSURES; OXYGEN TRANSMISSION RATE (OTR); REACTIVE ION BEAM SYNTHESIS (RIBS); STOICHIOMETRIC RATIO;

THIN FILMS;

EID: 21244439104 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2004.11.032 Document Type: Article

Times cited : (6)

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