The use of electron backscatter diffraction for the investigation of nano crystalline materials and the move towards orientation imaging in the TEM

Microchimica Acta

Volumn 147, Issue 3, 2004, Pages 157-165

  Dingley, David J ^a   Nowell, Matthew M ^a  

^a EDAX TSL   (United States)

Author keywords

Copper Damascene structures; Dark field electron microscopy; Electron Backscatter Diffraction; Nano crystals

Indexed keywords

EID: 21244431842     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00604-004-0186-6     Document Type: Article

References (6)

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2. Joy D C (1974) Electron channelling patterns in the SEM. Quantitative scanning electron microscopy. In: Holt D, Muir M D, Grant P B, Boswarva O I M (eds) Academic Press, London, p 31
3. Nowell M M (2002) J Electronic Mat 31: 23-32
4. Dingley D J, Wright S I, Dingley D J (1998) In Electron microscopy of semi conducting materials and ULSI devices. In: Hayzelden C, Hetherington C, Ross F (eds) Materials Research Society, San Francisco, CA, USA, pp 253-264
5. Zaefferer S (2000) J Appl Cryst 33: 10-16
6. Penelle R, Baudin D, Dingley D J, Tiner M, Wright S I (2002) Automatic orientation measurements in the TEM for studying FeNi recrystallisation. In: Textures and Materials ICOTOM 13, edt. Dong Nyung Lee, p 523