Deposition of nanostructured metal coatings on the modified silicon surfaces in the magnetoplasma compressor

Vacuum

Volumn 78, Issue 2-4, 2005, Pages 157-160

  Astashynski, V M ^a   Ananin, S I ^a   Askerko, V V ^a   Kostyukevich, E A ^a   Kuzmitski, A M ^a   Uglov, V V ^b   Cherenda, N N ^b   Anishchik, V M ^b   Sveshnikov, Yu V ^b   Astashynski, V V ^b   Kvasov, N T ^c   Danilyuk, A L ^c   Punko, A V ^c   Pauleau, Y ^d  

^a B I STEPANOV INSTITUTE OF PHYSICS   (Belarus)

^b BELARUSIAN STATE UNIVERSITY   (Belarus)

^c BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS   (Belarus)

^d GRENOBLE INSTITUTE OF TECHNOLOGY   (France)

Author keywords

Compression plasma flows; Deposition of nanostructured metal coatings; Regular surface structures; Wire explosion

Indexed keywords

COATING TECHNIQUES; COMPRESSORS; DEPOSITION; MAGNETOPLASMA; METALS; NANOSTRUCTURED MATERIALS; PLASMA FLOW; SILICON; WIRE PRODUCTS;

COMPRESSION PLASMA FLOWS; DEPOSITION OF NANOSTRUCTURES METAL COATINGS; REGULAR SURFACE STRUCTURES; WIRE EXPLOSION;

SURFACE PHENOMENA;

EID: 21044450951     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.019     Document Type: Conference Paper

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