Fabrication of current-induced magnetization switching devices using etch-back planarization process

Journal of Applied Physics

Volumn 97, Issue 10, 2005, Pages

  Ding, Yunfei ^a,b   Pakala, Mahendra ^a   Nguyen, Paul ^a   Meng, Hao ^b   Huai, Yiming ^a   Wang, Jian Ping ^b  

^a Grandis Inc   (United States)

^b University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION MILLING; MAGNETIC TUNNEL JUNCTION; METALLIC SYSTEMS; SPIN VALVES;

DEPOSITION; ELECTRON BEAMS; ETCHING; MAGNETIC DEVICES; MOLECULAR WEIGHT; PHOTOLITHOGRAPHY; POLYMETHYL METHACRYLATES; SPIN COATING; TUNNEL JUNCTIONS;

MAGNETIZATION;

EID: 20944442404     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1847971     Document Type: Conference Paper

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