Particle-in-cell simulation of an electron shock wave in a rapid rise time plasma immersion ion implantation process

Physics of Plasmas

Volumn 12, Issue 4, 2005, Pages 1-4

  Meige, Albert ^a   Jarnyk, Mark ^b   Kwok, Dixon T K ^c   Boswell, Rod W ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^c UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRONS; ION IMPLANTATION; MATHEMATICAL MODELS; MONTE CARLO METHODS; PLASMAS;

BOLTZMANN RELATIONS; COLLISION-PARTICLE-IN-CELL PLASMA COMPUTER CODES; PLASMA IMMERSION ION IMPLANTATION (PIII); STEADY-STATE PLASMA;

SHOCK WAVES;

EID: 20844445996     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1872894     Document Type: Article

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